E A S Y L I N E

Process Tool for coating and drying of:

- Wafers up to Ø 8” (Ø 200 mm)

• - Substrates up to 6” x 6” (150 mm x 150 mm)

easy maintenance, designed for integration in wet-benches or lab-tables

Easyline 200 type BM

EL200 System consisting of:

• spinner bowl
• Input terminal as colour-touch-screen with Windows CE up to 40 programmable recipes with eight (8) programmable individual steps (backup through USB possible)
• English / German operation manual on regular paper and on CD-ROM

Option:

• Manual movable dispense arm, usable for tube dispense or car-tridges (manual dispense, handled by operator)
• Vacuum and low contact chucks
• Vacuum pump
• Power-supply with 24 DC / 10 A

Easyline 200 type TT