• Semiconductor
  • MEMS
  • piezoMEMS
  • Display (OLED / LCD)
  • Nanoimprint
  • Plastic materials
  • Photomasks
  • Compound Semiconductor
  • Post CMP cleaning

About solar-semi                          

solar-semi consists of a multi talented team of engineers, technicians and colleagues with decades of experience in design, assembly and support of advanced process equipment. Our systems are based on standardized platforms, which allow a wide range of individual configurations for processing and handling of fragile substrates used in the semiconductor, MEMS, piezoMEMS, OLED display and similar industries as well as in R&D. The unique combinations of experience, process know-how, flexibility and  … » solar-semi



  • Large Lithography Tools

    Large Lithography Tools

    solar-semi GmbH delivered a set of three Large Substrate Lithography Tools to the Far East. One of the main challenges in designing and manufacturing these systems has been to process large, very fragile and extremely cost intensive glass substrates up to 1,4 meters in diagonal. The tool set consists of a spin coater, hotplate, developer and etcher.



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